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Cleanroom Robot - AR-W130CL - AR-W250VHCL

 

Features
  • Small footprint does not disturb laminar flow in the clean room.
  • High performance robot achieves higher through-put.
  • Wafer turner option allows you to process reverse side of wafer.
  • No lubrication is required and saves your service cost.

System Integration

Our Clean Room Modules are developed through our long and in-depth experience to be easily and most efficiently integrated in automation systems. 
Your favorite controller is ready to communicate with the Hirata robot controller. No need to learn new programming language. Simplified teaching and control method will shorten your time to deploy the process of automation.
Max. 12 axes can be controlled by a single controller.

Peripheral

FOUP/Autodoor FOSB Opener, Prealigner and SMIF Pods Opener are available as a part of clean modules system. These peripherals can be integrated with Hirata controller.

KWF-12C
FOUP/Autodoor FOSB Opener:

 For safe and simple opening and locking of FOUPs and FOSBs

Wafer size: 8" and 12"
KWA-12 
Prealigner:		 Non-contact sensor guided aligner

High speed and accorate orientation on both standard and notch wafer

Wafer size: 6", 8", 12" and 8"/12" selectable
KWF-12 
SMIF Pods Opener:		 Small footprint. Transforming cassettes by arm realizer higher performance through-put. 

Option:Mapping function

Wafer size: 8" and 12"

Model Code:

AR - W200CL - 4 - S R - 300
(1) (2) (3) (4) (5)
(1) Model
200: AR-W200CL series
(2) Degree of Freedom
(3) Arm Type
S: Single amr
T: Twin arm
(4) Turner Axis (C axis)
No mark: No Turner
R: with turner (C) axis
RR: with 2 turner (C) axis
(5) Z-Axis Stroke

 

Robot type Atmospheric type robot
Type AR-W200 (150) CL-
3-S-300 4-SR-300 4-T-300 5-TR-300 6-TRR-300
Arm type Single arm Single arm Twin arm Twin arm with turner axis twin arm with turner axis
Operational area R1-axis 590 (440) mm 590 (440) mm 590 (440) mm 590 (440) mm 590 (440) mm
R2-axis - - 590 (440) mm 590 (440) mm 590 (440) mm
C-axis - 190° (360°) - 190° (360°) 190° (360°)
Θ-axis 340° 340° 340° 340° 340°
Z-axis 300 mm 3250 mm
Axis speed R1-axis 1200 (900) mm/s 1200 (900) mm/s 1200 (900) mm/s 1200 (900) mm/s 1200 (900) mm/s
R2-axis - - 1200 (900) mm/s 1200 (900) mm/s 1200 (900) mm/s
C-axis - 540°/s - 540°/s 540°/s
Θ-axis 360°/s 360°/s 360°/s 360°/s 360°/s
Z-axis 500 mm/s 500 mm/s 500 mm/s 500 mm/s 500 mm/s
min. Pass-line 634 mm 681 mm 656 mm 717 mm 717 mm
min. Swinging envelope 245 (195) mm 275 mm 313 (263) mm 313 (263) mm 313 (263) mm
Repeatability R1-axis ± 0.05 mm ± 0.05 mm ± 0.05 mm ± 0.05 mm ± 0.05 mm
R2-axis - - ± 0.05 mm ± 0.05 mm ± 0.05 mm
C-axis - ± 0.06° - ± 0.06° ± 0.06°
Θ-axis ± 0.03° ± 0.03° ± 0.03° ± 0.03° ± 0.03°
Z-axis ± 0.05 mm ± 0.05 mm ± 0.05 mm ± 0.05 mm ± 0.05 mm
Clean class Class 1 (0.1 µm/cf)
Applicable wafer size 4 – 12 inch
Payload 500 g
Weight 35 kg 37 kg 40 kg 43 kg 45 kg
Foot print 250 mm x 250 mm

 

Robot type Atmospheric type robot
Type AR-W180 (130) CL-
3-S-300 4-SR-300 4-T-300
Arm type Single arm Single arm with turner axis Twin arm
Operational area R1-axis 530 (390) mm 530 (390) mm 530 (390) mm
R2-axis - - 530 (390) mm
C-axis - 190° (360°) -
Θ-axis 340° 340° 340°
Z-axis 300 mm
Axis speed R1-axis 1080 (780) mm/s 1080 (780) mm/s 1080 (780) mm/s
R2-axis - - 1080 (780) mm/s
C-axis - 540°/s -
Θ-axis 360°/s 360°/s 360°/s
Z-axis 500 mm/s 500 mm/s 500 mm/s
min. Pass-line 634 mm 681 mm 656 mm
min. Swinging envelope 225 (178) mm 275 mm 293 (243) mm
Repeatability R1-axis ± 0.05 mm ± 0.05 mm ± 0.05 mm
R2-axis - - ± 0.05 mm
C-axis - ± 0.06° -
Θ-axis ± 0.03° ± 0.03° ± 0.03°
Z-axis ± 0.05 mm ± 0.05 mm ± 0.05 mm
Clean class Class 1 (0.1 µm/cf)
Applicable wafer size 4 – 12 inch
Payload 500 g
Weight 35 kg 37 kg 40 kg
Foot print 250 mm x 250 mm

 

Robot type Atmospheric type robot (light version) Vacuum type robot
Type AR-WL180CL AR-W170VHCL AR-W250VHCL AR-170VLCL AR-W170VLCL AR-W150VLCL
3-S-300 4 –T- 300 4-T-40 3-S-20 4-T-40 3-S-40 3-S-350
Arm type Single arm Twin High Vacuum Twin arm High vacuum single arm Low vacuum twin arm Low vacuum single arm Low vacuum single
Operational Area R1-axis 530 mm 580 mm 608 mm 730 mm 608 mm 500 mm 440 mm
R2-axis - 580 mm 608 mm - 608 mm - -
Θ-axis 340° 340° 330° 330° 330° 330° 330°
Z-axis 300 mm 300 mm 40 mm 20 mm 40 mm 40 mm 350 mm
Axis speed R1-axis 1300 mm/s 1300 mm/s 1000 mm/s 800 mm/s 1000 mm/s 1000 mm/s 1000 mm/s
R2-axis - 1300 mm/s 1000 mm/s - 1000mm/s - -
Θ-axis 400°/s 400°/s 216°/s 200°/s 216°/s 216°/s 216°/s
Z-axis 500 mm/s 500 mm/s 100 mm/s  20 mm/s 100 mm/s 100 mm/s 250 mm/s
min. Pass-line 570 mm 655 mm 229 mm 113 mm 213 mm 80 mm 80 mm
min. Swinging envelope 215 mm 240 mm 345 mm 290 mm 345 mm 210 mm 190 mm
Repeatability R1-axis ± 0.05 mm ± 0.05 mm ± 0.05 mm ± 0.05 mm ± 0.05 mm ± 0.05 mm ± 0.05 mm
R2-axis - ± 0.05 mm ± 0.05 mm - ± 0.05 mm - -
Θ-axis ±0.03° ± 0.03° ± 0.03° ± 0.03° ± 0.03° ± 0.03° ± 0.03°
Z-axis ± 0.05 mm ± 0.05 mm ± 0.05 mm ± 0.05 mm ± 0.05 mm ± 0.05 mm ± 0.05 mm
Clean class Class 1 (0.1 µm/cf) Class 2
Applicable wafer size 6 – 12 inch 2 – 12 inch
Payload 300 g 800 g
Weight 18 kg 25 kg 55 kg 35 kg 47 kg 40 kg 58 kg
Foot print 250 mm x 250 mm Ø 360 mm Ø 235 mm Ø 360 mm Ø 360 mm Ø 360 mm
Vacuum resistant   10-6 Pa 10-6 Pa 10-1 Pa 10-1 Pa 10-1 Pa

 


Single Arm AR-W150CL-3-S-325

 


Twin Arm AR-W200CL-6-TRR-350

 

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